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 National Science
Foundation Award #9023711 |
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Theoretical Modeling of Micro-electro-mechanical Systems
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| Investigator(s): |
Wen Ko (PI)
; Mehran Mehregany (Co-PI)
; Robert Mullen (Co-PI)
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| Sponsor: |
Case Western Reserve University, OH 44106 2163684510
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| Start Date/Expiration Date |
1991-06-15 to 1994-08-31 (amended 1993-07-23) |
| Awarded Amount to Date: |
$300,000 |
| Abstract: This is a three-year program in Theoretical Modeling of Microelectromechanical Systems combining the efforts of investigators from the Electrical Engineering and Civil Engineering Department at Case Western Reserve University. The program objectives are to carry out theoretical studies to gain a fundamental understanding of electromechanical and (mechanical) interface characteristics of microfabricated electromechanical devices and to produce models which can predict the electromechanical performance of these devices. A thorough understanding of these electromechanical and interface properties as well as predictive theoretical models is necessary for successful design and fabrication of microelectromechanical systems (MEMS). The research program is organized into two parts: (i) development of advanced computational techniques for electromagnetic, (mechanical) stress, and coupled electromagnetic/stress fields analysis in microelectromechanical devices and (ii) development of theoretical interface models for friction, lubrication, and wear in microelectromechanical devices. These two parts have a synergetic relation toward the objectives stated above. |
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| NSF Org: |
ECS - Division of Electrical & Communications Systems |
| Award Number: |
9023711 |
| Award Instrument: |
Continuing grant |
| Program Manager: |
George K. Lea
ECS Division of Electrical & Communications Systems
ENG Directorate for Engineering
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| NSF Program(s): |
CONTROL, NETWORKS, & COMP INTE, DYNAMICS & CONTROL, ELECT, PHOTONICS, & DEVICE TEC, MANUFACTURING MACHINES & EQUIP, SPECIAL PROGRAMS-RESERVE, DYNAMICS & CONTROL
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| Field Application(s): |
Engineering-Electrical, Engineering-Mechanical, Industrial Technology |
| Program Reference Code(s): |
DYNAMICS & CONTROL, 1445
MANUFACTURING MACHINES & EQUIP, 1468 |
| Program Element Code(s): |
1518
DYNAMICS & CONTROL, 1445
ELECT, PHOTONICS, & DEVICE TEC, 1517
MANUFACTURING MACHINES & EQUIP, 1468
SPECIAL PROGRAMS-RESERVE, 9145
, 1445
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